# US 7,607,349 B2 · Angular velocity sensor structure

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- Number: US 7,607,349 B2
- Document ID: US7607349B2
- Status: Granted
- Kind: B2
- Application number: 11/854,871
- Filed: 2007-09-13
- Published: 2008-03-06
- Granted: 2009-10-27
- Earliest claimed: 2006-08-31
- Assignees: SML Electronics, Inc.
- Inventors: Sang Chul Lee; Sung Wook Kim
- Web page: https://patentgrep.com/patent/US7607349B2

## CPC

- G01P 15/125: by capacitive pick-up
- G01C 19/56: Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01P 2015/0814: {for translational movement of the mass, e.g. shuttle type}
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)

## Abstract

An angular velocity sensor structure for improving the off-axis sensitivity is provided in which a structure for detecting an off-axis acceleration component applied to the angular velocity sensor structure is directly adapted to the sensor structure, thereby measuring the off-axis acceleration component actually applied to the sensor structure without distortion.

## Claims

### Claim 1

An angular velocity sensor structure comprising:
a driving unit movably formed on a board;
an angular velocity detecting unit formed on the board that detects angular velocity by the motion of the driving unit; and
an off-axis acceleration detecting unit formed on the same board as the angular velocity detecting unit that detects off-axis acceleration by the motion of the driving unit
wherein the angular velocity detected by the angular velocity detecting unit is corrected using the off-axis acceleration detected by the off-axis acceleration detecting unit.

### Claim 2 (depends on 1)

The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance.

### Claim 3 (depends on 1)

The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same structure.

### Claim 4 (depends on 1)

The angular velocity sensor structure according to claim 1, wherein the angular velocity detecting unit and the off-axis acceleration detecting unit have the same capacitance and structure.