# US 7,607,344 B2 · Factory-alignable compact cantilever probe > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,607,344 B2 - Document ID: US7607344B2 - Status: Granted - Kind: B2 - Application number: 11/789,044 - Filed: 2007-04-23 - Published: 2008-10-23 - Granted: 2009-10-27 - Earliest claimed: 2007-04-23 - Inventors: Frederick Sachs - Web page: https://patentgrep.com/patent/US7607344B2 ## CPC - G01Q 10/04: Fine scanning or positioning - B82Y 35/00: Methods or apparatus for measurement or analysis of nanostructures - G01Q 20/02: by optical means - G01Q 60/38: Probes, their manufacture, or their related instrumentation, e.g. holders - G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract A scanner which includes a gradient index lens for passing and focusing beams from a radiation emitter to a cantilevered member reflective surface of a probe and from the reflective surface to a radiation detector. The lens also serves as a mechanical support for attachment of the radiation emitter and the radiation detector and is also attached to a support for the cantilevered member. The resulting fixed positions of the radiation emitter and the radiation detector relative to the reflective cantilevered member surface allows the scanner to be compact and factory focally alignable. ## Claims ### Claim 1 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, wherein said structure is a gradient index lens. ### Claim 2 (depends on 1) A probe according to claim 1 further comprising a support attached to said structure for supporting said cantilevered member, and a pair of co-axial torsion bars connecting said cantilevered member to said support. ### Claim 3 (depends on 1) A probe according to claim 1 wherein said beam emitter is a laser light generator. ### Claim 4 (depends on 1) A probe according to claim 1 wherein said beam emitter is a vertical cavity laser light generator. ### Claim 5 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, the probe further comprising a support attached to said structure for supporting said cantilevered member, a protrusion on one of said support and said structure, and a cavity in the other of said support and said structure, said protrusion received in said cavity. ### Claim 6 (depends on 5) A probe according to claim 5 further comprising a thermoplastic adhesive attaching said protrusion within said cavity. ### Claim 7 (depends on 5) A probe according to claim 5 wherein said structure is a gradient index lens. ### Claim 8 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, the probe further comprising a support attached to said structure for supporting said cantilevered member and having a cavity therein, a protrusion on said structure and received in said cavity. ### Claim 9 (depends on 8) A probe according to claim 8 further comprising a thermoplastic adhesive attaching said member to said protrusion. ### Claim 10 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, the probe further comprising a gimbaled structure attached to said beam passing and focusing structure for effecting swinging movements thereof in orthogonal directions for rastering said cantilevered member over the specimen, said gimbaled structure comprising an inner and a middle member connected by a first pair of co-axial torsion bars for effecting swinging movements of said beam passing and focusing structure in one of the orthogonal directions and further comprising an outer member connected to said middle member by a second pair of co-axial torsion bars for effecting swinging movements of said beam passing and focusing structure in an other of the orthogonal directions. ### Claim 11 (depends on 10) A probe according to claim 10 wherein said beam emitter is a vertical cavity laser light generator. ### Claim 12 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, the probe further comprising a member attached to said beam passing and focusing structure, structure for supporting said member, said member hingedly connected to said supporting structure to move hingedly in orthogonal directions for effecting swinging movements of said beam passing and focusing structure in the orthogonal directions, and at least one device for effecting the movements hingedly of said member. ### Claim 13 (depends on 12) A probe according to claim 12 further comprising a pair of optical levers to provide feedback to said at least one device of positions of said beam passing and focusing structure in orthogonal directions respectively for linearizing a scan position. ### Claim 14 (depends on 13) A probe according to claim 13 wherein said beam emitter is a vertical cavity laser light generator. ### Claim 15 A probe comprising a structure for passing and focusing radiation beams, a cantilevered member attached to said structure for probing a specimen as said cantilevered member is rastered over the specimen, a reflective surface on said cantilevered member, a beam emitter attached to said structure to emit radiation beams for passage through said structure to said reflective surface, and a radiation beam detector attached to said structure, said structure adapted to focus radiation beams from said beam emitter to said reflective surface and from said reflective surface to said beam detector, the probe further comprising a member composed of an insulative material attached to said structure, said beam emitter and said beam detector attached to said member, wires evaporated on said member and connected to said beam emitter and said beam detector for carrying signals and/or power. ### Claim 16 In combination with a supporting structure, a cantilevered member for probing a specimen and for reflecting beams to a beam detector to indicate probe position, a support attached to said supporting structure for supporting said cantilevered member, a protrusion on one of said support and said supporting structure, a cavity in the other of said support and said supporting structure for receiving said protrusion, said protrusion being attached to said other of said support and said supporting structure, the combination further comprising a thermoplastic adhesive attaching said protrusion within said cavity. ### Claim 17 (depends on 16) A combination according to claim 16 wherein said protrusion is on said supporting structure. ### Claim 18 (depends on 16) A combination according to claim 16 wherein the cavity is on said support. ### Claim 19 (depends on 16) A combination according to claim 16 wherein the cavity has an alignment maintaining shape. ### Claim 20 (depends on 16) A combination according to claim 16 further comprising a pair of co-axial torsion bars connecting said cantilevered member to said support.