External cavity tunable laser system formed from MEMS corner mirror
AssigneeWalsin Lihwa Corporation
InventorsLong-Sun Huang, Chao-Sen Chang, Ta-Shun Chu, Son-Nan Chen
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Abstract
A tunable laser system is provided. The tunable laser system includes a light source, a grating, a corner mirror array, and a receiver. In which, the light source emits a beam, and the grating is located in front of the light source for reflecting the beam to form a first reflective beam. Also, the corner mirror array is located in front of the grating for receiving the first reflective beam and forms a second reflective beam accordingly. In addition, the receiver is used to receive a third reflective beam formed from reflecting the second reflective beam through the grating.
Claims20
A corner mirror, comprising:
- a first mirror having a revolving spindle connected thereto;
- a spacer connected to said first mirror and being apart from said revolving spindle;
- and
- a second mirror being apart from said revolving spindle and connected to said spacer so as to be arranged perpendicular to said first mirror.
A corner mirror array, comprising:
- a first mirror array;
- a first electrode array connected to said first mirror array;
- a set of spacers, each of which comprises a first connecting surface and a second connecting surface, wherein each said first connecting surface is connected to said first mirror array;
- and
- a second mirror array connected to each said second connecting surface so as to be arranged perpendicular to said first mirror array and to fix the set of spacers between said first and said second mirror arrays.
Dependencies are inferred from the claim text.