Optical deflector

An optical deflector comprising:

• a mirror having a reflective plane;
• a pair of first torsion bars respectively extending outwardly from two opposing sides of said mirror, said pair of first torsion bars being substantially coaxial to each other to define a first rotational axis;
• a movable frame surrounding said mirror;
• a pair of first piezoelectric cantilevers disposed across said mirror from each other, each of the first piezoelectric cantilevers including a supporting body and a piezoelectric body formed on the supporting body, one end of the first piezoelectric cantilever being connected to said first torsion bar, the other end of the first piezoelectric cantilever being connected to said movable frame, said pair of first piezoelectric cantilevers, upon application of driving voltages to the respective piezoelectric bodies, exhibiting respective bending deformations due to piezoelectricity so as to rotate said pair of first torsion bars relative to the movable frame around the first rotational axis, thereby rotarily driving said mirror through said first torsion bars relative to the movable frame around the first rotational axis;
• a first impact attenuator connected to said movable frame, the impact attenuator being disposed in a gap between said mirror and said movable frame;
• a pair of second torsion bars respectively extending outwardly from two opposing sides of said movable frame, said pair of second torsion bars being substantially coaxial to each other to define a second rotational axis;
• a support surrounding said movable frame;
• a pair of second piezoelectric cantilevers disposed across said movable frame from each other, each of the second piezoelectric cantilevers including a supporting body and a piezoelectric body formed on the supporting body, one end of the second piezoelectric cantilever being connected to said second torsion bar, the other end of the second piezoelectric cantilever being connected to said support, said pair of second piezoelectric cantilevers, upon application of driving voltages to the respective piezoelectric bodies, exhibiting respective bending deformations due to piezoelectricity so as to rotate said pair of second torsion bars relative to the support around the second rotational axis, thereby rotarily driving said movable frame through said pair of second torsion bars relative to the support around the second rotational axis;
• and
• a second impact attenuator connected to said support, the second impact attenuator being disposed in a gap between said movable frame and said support.