Array of micromirrors with non-fixed underlying structures

An array of micromirrors with non-fixed underlying structures having a plurality of micromirrors comprising:

• a) a bottom layer having control circuitry;
• b) a micromirror having a top side and a bottom side, wherein the top side has a reflective surface;
• and
• c) underlying structures for providing actuation force and restoration force for motion of the micromirror and generating the micromirror motions;
• wherein the underlying structures are aligned with a principal rotation of the micromirror motion and wherein the underlying structures comprise:
• a) at least one bottom electrode to provide electrostatic actuation force;
• b) at least one flexible structure to provide restoration force for the micromirror;
• and
• c) at least one post structure connecting and supporting the underlying structures and the micromirror;
• wherein the underlying structures of each micromirror is individually oriented and aligned during fabrication process to generate a single principal rotational motion for forming a desired surface profile.