System and method to create haze standard
AssigneeKLA-Tencor Corporation
InventorsChristian Wolters, Aleksey Petrenko, Jurgen Reich
Life of this patent
Estimating the term…
Abstract
In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembly and the surface of the object, and a controller to regulate the radiation targeting assembly to deliver radiation at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
Claims14
A system for creating a haze standard on a surface of an object, comprising:
- a radiation targeting assembly for targeting a radiation beam onto the surface;
- a drive assembly for imparting relative motion between the radiation beam and the surface;
- and
- a controller for regulating the radiation beam at a plurality of controlled power levels to a plurality of concentric rings on the surface, thereby forming a plurality of regions having known haze characteristics.
A system for creating a haze standard on a surface of an object, comprising:
- a laser source for generating a radiation beam and for targeting the radiation beam onto the surface at a power level sufficient to create a desired haze change on the surface;
- a first drive assembly for moving the radiation beam in a radial direction across the surface;
- a second drive assembly for rotating the object such that the surface moves at a constant velocity, and
- a controller for regulating the radiation beam at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
A method for creating a haze standard on a surface of an object, the method comprising the steps of:
- targeting a radiation beam onto the surface;
- imparting relative motion between the radiation beam and the surface;
- and
- delivering the radiation beam at a plurality of controlled power levels and to a plurality of concentric rings on the surface, thereby forming a plurality of regions having known haze characteristics.
A method for creating a haze standard on a surface of an object, the method comprising the steps of:
- targeting a radiation beam onto the surface;
- imparting relative motion between the radiation beam and the surface;
- powering the radiation beam at a power level sufficient to create a desired haze change on the surface;
- moving the radiation beam radially across the surface;
- and
- rotating the object such that the surface moves at a constant velocity,
- thereby forming at least one region on the surface having a known haze characteristic.
A system for creating a haze standard on a surface of an object, comprising:
- means for directing a radiation beam onto the surface;
- means for imparting relative motion between the radiation beam and the surface;
- and
- means for delivering the radiation beam at a plurality of controlled power levels to a plurality of concentric rings on the surface, thereby forming a plurality of regions having known haze characteristics.
A system for creating a haze standard on a surface of an object, comprising:
- a laser source for generating a radiation beam at a power level sufficient to create a desired haze change on the surface;
- a first drive assembly for moving the radiation beam in a radial direction across the surface;
- a second drive assembly for rotating the object such that the surface moves at a constant velocity, and
- means for delivering radiation at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
Dependencies are inferred from the claim text.