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US 7,605,675 B2Granted
Electromechanical switch with partially rigidified electrode
AssigneeIntel Corporation
InventorsHanan Bar, Tsung-Kuan Allen Chou
Life of this patent
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Abstract
An electromechanical switch with a rigidified electrode includes an actuation electrode, a suspended electrode, a contact, and a signal line. The actuation electrode is disposed on a substrate. The suspended electrode is suspended proximate to the actuation electrode and includes a rigidification structure. The contact is mounted to the suspended electrode. The signal line is positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode.
Claims14
A switch, comprising:
- an actuation electrode disposed on a substrate;
- a suspended electrode suspended proximate to the actuation electrode, the suspended electrode including a rigidification structure;
- a contact mounted to the suspended electrode;
- and
- a signal line positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode,
- wherein the rigidification structure is localized about the contact to rigidify a portion of the suspended electrode less than the entire suspended electrode,
- wherein the rigidification structure comprises at least one of a checkerboard topology, an undulated topology, an elongated mesa structure, a plurality of bumps in the suspended electrode, a plurality of ridges in the suspended electrode, or a plurality of dimples in the suspended electrode.
4 more elements
A method of operating a switch, comprising:
- propagating a signal along a signal line;
- applying an actuation voltage, between an actuation electrode and a suspended electrode suspended proximate to the actuation electrode, to progressively bend the suspended electrode toward the actuation electrode;
- close circuiting the signal line with a contact mounted to the suspended electrode proximate to a rigidification structure disposed in a portion of the suspended electrode;
- and
- propagating the signal between the signal line and the contact,
- wherein the rigidification structure comprises a 3-dimensional rigidification topology disposed in the portion of suspended electrode localized about the contact,
- wherein the actuation voltage is applied between the actuation electrode and the suspended electrode with alternating polarity between instances of close circuiting the signal line with the contact.
4 more elements
A system, comprising:
- an amplifier;
- an antenna;
- and
- an electromechanical switch coupled in series with the amplifier and the antenna, the electromechanical switch including:
- an actuation electrode disposed on a substrate;
- a suspended electrode suspended proximate to the actuation electrode, the suspended electrode including a rigidification structure;
- a contact mounted to the suspended electrode;
- and
- a signal line positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode,
- wherein the rigidification structure comprises a 3-dimensional rigidification topology localized about the contact,
- wherein the 3-dimensional rigidification topology is also disposed in the actuation electrode.
8 more elements
A switch, comprising:
- an actuation electrode disposed on a substrate;
- a suspended electrode suspended proximate to the actuation electrode, the suspended electrode including a rigidification structure;
- a contact mounted to the suspended electrode;
- and
- a signal line positioned proximate to the suspended electrode to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the suspended electrode,
- wherein the rigidification structure comprises a 3-dimensional rigidification topology disposed in the suspended electrode,
- wherein the 3-dimensional rigidification topology is also disposed in the actuation electrode.
4 more elements
Dependencies are inferred from the claim text.