Transformer for impedance-matching power output of RF amplifier to gas-laser discharge

A method of making an RF transformer, the method comprising:

• providing first and second dielectric plates each having a first surface and a second surface;
• bonding the first surface of the first dielectric plate to the first surface of the second dielectric plate with a first transformer winding in the form of a first electrically conductive strip disposed between the first and second dielectric plates, wherein the first transformer winding serves as one of either a primary winding or a secondary winding,
• forming a second transformer winding in the form of a second conductive strip on the second surface of the first dielectric plate, said second transformer winding being positioned to at least partially overlie the first transformer winding and
• wherein the first dielectric plate is sufficiently thin to permit inductive coupling between the first and second transformer windings,
• wherein the second transformer winding serves as the other of either a primary or a secondary winding;
• wherein the primary winding has one generally U-shaped turn, and has a first strip width, and
• wherein the secondary winding has two or more turns, and has a second strip width, wherein the product of the number of turns and the second strip width is less than the first strip width;
• forming a ground plane electrode on the second surface of the second dielectric plate;
• and
• forming an electrical connector that connects the second transformer winding to the ground plane electrode via a via-hole that extends through the first and second dielectric plates.

An RF transformer comprising:

• first and second dielectric plates each having an upper surface and lower surface, the lower surface of the first dielectric plate being bonded to the upper surface of the second dielectric plate by intervening adhesive material;
• a primary winding disposed between the lower surface of the first dielectric plate and the upper surface of the second dielectric plate, the primary winding having one generally U-shaped turn and having a first strip width;
• a secondary winding formed on the upper surface of the first dielectric plate, the secondary winding having two or more turns and a second strip width, wherein the product of the number of turns and the second strip width is less than the first strip width, said secondary winding being positioned to at least partially overlie the primary winding and wherein the first dielectric plate is sufficiently thin to permit inductive coupling between the primary and secondary windings;
• a ground plane electrode formed on the lower surface of the second dielectric plate;
• and
• an electrical connector that extends through the first and second dielectric plates to connect the secondary winding to the ground plane electrode.

A method of making an RF transformer, the method comprising:

• providing first and second dielectric plates each having an upper surface and a lower surface;
• bonding the lower surface of the first dielectric plate to the upper surface of the second dielectric plate using an adhesive material such that a primary winding is disposed between the lower surface of the first dielectric plate and the upper surface of the second dielectric plate, the primary winding having one generally U-shaped turn and a first strip width;
• forming a secondary winding on the upper surface of the first dielectric plate, the secondary winding having two or more turns and a second strip width, wherein the product of the number of turns and the second strip width is less than the first strip width, said secondary winding being positioned to at least partially overlie the primary winding and wherein the first dielectric plate is sufficiently thin to permit inductive coupling between the primary and secondary windings;
• forming a ground plane electrode on the lower surface of the second dielectric plate;
• and
• forming an electrical connector that extends through the first and second dielectric plates to connect the secondary winding to the ground plane electrode.