Piezoelectric device, its manufacturing method, and touch panel device
AssigneeFujitsu Limited
InventorsTakashi Katsuki, Fumihiko Nakazawa, Satoshi Sano, Yuji Takahashi
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Abstract
A piezoelectric device (X) includes a substrate (11) a piezoelectric film (12), a first electrode (13), and a second electrode (14). At least one of the first electrode (13) and the second electrode (14) is interposed between the substrate (11) and the piezoelectric film (12), and made of an Al alloy containing 0.1 to 3 wt % of at least one metal selected from the group consisting of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au.
Claims10
A piezoelectric device comprising a non-piezoelectric substrate, a piezoelectric film formed on the substrate, a first electrode, and a second electrode;
- wherein at least one of the first electrode and the second electrode is interposed between the substrate and the piezoelectric film, and made of an Al alloy containing approximately 0.1 to 3 wt % of at least one metal selected from the group consisting of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au;
- at least one of the first electrode and the second electrode includes a base portion, and a plurality of branch electrodes that extend out from the base portion and are parallel to one another;
- and
- h/λ has a value in range of approximately 0.005 to 0.1, wherein h is a thickness of the piezoelectric film, and λ is an electrode period of the plurality of branch electrodes, λ having a value in range of approximately 100 to 150 μm.
A touch panel device comprising:
- a non-piezoelectric substrate including a detection region and a peripheral region surrounding the detection region;
- exciting means provided in the peripheral region for exciting surface acoustic waves in the substrate;
- and
- receiving means provided in the peripheral region for receiving surface acoustic waves propagated through the detection region;
- wherein at least one of the exciting means and the receiving means comprises a piezoelectric film formed on the substrate, a first electrode, and a second electrode, wherein at least one of the first electrode and the second electrode is interposed between the substrate and the piezoelectric film, and made of an Al alloy containing 0.1 to 3 wt % of at least one metal selected from the group consisting of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt and Au;
- at least one of the first electrode and the second electrode includes a base portion, and a plurality of branch electrode that extend out from the base portion and are parallel to one another;
- and
- h/λ has a value in range of approximately 0.005 to 0.1, wherein h is a thickness of the piezoelectric film, and λ is an electrode period of the plurality of branch electrode, λ having a value in a range of approximately 100 to 150 μm.
Dependencies are inferred from the claim text.