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US 7,605,383 B2Granted
Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium
AssigneeNuFlare Technology, Inc.
InventorsTomoyuki Horiuchi, Takeshi Kurohori
Life of this patent
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Abstract
A charged particle beam pattern writing apparatus includes an input part for inputting a predetermined command, a check part for checking a state of a predetermined function used for pattern writing using a charged particle beam, based on the predetermined command, and an output part for outputting the state of the predetermined function which has been checked.
Claims13
A charged particle beam pattern writing apparatus comprising:
- an input part configured to input a predetermined command;
- a check part configured to check a state of a predetermined function used for pattern writing using a charged particle beam, based on the predetermined command;
- and
- an output part configured to output the state of the predetermined function which has been checked.
1 more element
A computer-readable recording medium with a program recorded for causing a computer to execute processes of:
- inputting a predetermined command and storing it in a first storage device;
- reading the predetermined command from the first storage device, checking a state of a predetermined function used for pattern writing using a charged particle beam, based on the predetermined command, and storing the state of the predetermined function which has been checked in at least one of the first storage device and a second storage device;
- and
- displaying the state of the predetermined function which has been checked on a monitor.
1 more element
Dependencies are inferred from the claim text.