Back to results
US 7,605,379 B2Granted
Cold-cathode-based ion source element
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsLin Xiao, Yuan-Chao Yang, Li Qian, Liang Liu, Pi-Jin Chen, Zhao-Fu Hu, Shou-Shan Fan
Life of this patent
Estimating the term…
Abstract
An ion source element includes a cold cathode, a grid electrode, and an ion accelerator. The cold cathode, the grid electrode, and the ion accelerator are arranged in that order and are electrically separated from one another. A space between the cold cathode and the grid electrode is essentially smaller than a mean free path of electrons at an operating pressure. The ion source element is thus stable and suitable for various applications.
Claims10
An ion source element comprising:
- a cold cathode, a grid electrode, and an ion accelerator arranged in that order and being electrically separated from one another, wherein a space between the cold cathode and the grid electrode is smaller than about a mean free path of electrons at an operation pressure of the ion source element.
Dependencies are inferred from the claim text.