On-chip reflectron and ion optics
AssigneeZyvex Corporation
InventorsGuido Fridolin Verbeck, IV, Kenneth Tsui
Life of this patent
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Abstract
A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.
Claims18
A microelectronics apparatus, comprising:
- a substrate;
- a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate;
- and
- a plurality of ion reflection lenses coupled to the substrate, wherein each ion reflection lens:
- is substantially perpendicular to each of the grid electrodes;
- extends substantially perpendicular from the substrate;
- and
- has an aperture aligned with the central axis has a thickness ranging between about 5 μm and about 100 μm.
A method of manufacturing a microelectronics, comprising:
- coupling an ion source and an ion detector to a substrate;
- coupling a pair of grid electrodes to the substrate on opposing sides of a central axis of the ion source;
- and
- coupling a plurality of ion reflection lenses to the substrate in series such that the grid electrodes interpose the ion source and the plurality of ion reflection lenses;
- wherein the ion reflection lenses each have a thickness ranging between about 5 μm and about 100 μm
- wherein the grid electrodes and the ion reflection lenses are electrically biased to collectively direct ions emitted from the ion source to travel through the grid electrodes and the ion reflection lenses back towards the ion detector.
Dependencies are inferred from the claim text.