Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope

A method of evaluating a resolution of a scanning electron microscope, comprising the steps of:

• picking up images of an concave and convex pattern formed on a surface of a sample and having such a sectional shape that a lower part of the concave and convex pattern is narrower than an upper part thereof, by successively using a plurality of scanning electron microscopes, in order to obtain a plurality of images of the concave and convex pattern;
• respectively processing the plurality images of the concave and convex pattern successively picked up by the plurality of scanning electron microscopes in order to evaluate unevenness in resolution among the plurality of scanning electron microscopes, and
• finding a particular scanning electron microscope among the plurality of scanning electron microscopes, for adjusting microscope parameters with the use of a result of the evaluation of the unevenness in resolution.

A method of evaluating a resolution of a scanning electron microscope, comprising the steps of:

• picking up a first image of a concave and convex pattern formed on a surface of a sample and having such a sectional shape that a lower part of the concave and convex pattern is narrower than an upper pad thereof with the use of a scanning electron microscope,
• picking up a second image of the concave and convex pattern with the use of the said scanning electron microscope after a predetermined time elapses, and
• comparing the first image and the second image with each other so as to evaluate an aging of resolution of the scanning electron microscope.