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AssigneeLam Research Corporation
InventorsRobert J. O'Donnell, Christopher C. Chang, John E. Daugherty
Estimating the term…
A corrosion resistant component of a plasma chamber includes a liquid crystalline polymer. In a preferred embodiment, the liquid crystalline polymer (LCP) is provided on an aluminum component having an anodized or non-anodized surface. The liquid crystalline polymer can also be provided on an alumina component. The liquid crystalline polymer can be deposited by a method such as plasma spraying. The liquid crystalline polymer may also be provided as a preformed sheet or other shape adapted to cover the exposed surfaces of the reaction chamber. Additionally, the reactor components may be made entirely from liquid crystalline polymer by machining the component from a solid block of liquid crystalline polymer or molding the component from the polymer. The liquid crystalline polymer may contain reinforcing fillers such as glass or mineral fillers.
A process of making a component of semiconductor processing equipment, the process comprising plasma spraying a liquid crystalline polymer on a surface of the component by feeding liquid crystalline polymer powder into a plasma flame to form molten or heat-softened particles, wherein the liquid crystalline polymer particles form a plasma sprayed coating on an outermost surface of the component.
A process of making a component of semiconductor processing equipment, the process comprising applying a liquid crystalline polymer in the form of a preformed sheet as a covering to a surface of the component, wherein the liquid crystalline polymer is configured to interlock with the component and forms an outermost surface of the component.
A process of making a component of semiconductor processing equipment, the process comprising providing a liquid crystalline polymer on a surface of the component, wherein the liquid crystalline polymer forms an outermost surface of the component, wherein the component is a component selected from the group consisting of a plasma chamber wall, a gas distribution plate, a gas ring, a pedestal, an electrostatic chuck and a focus ring and comprises a liquid crystalline polymer on an outer surface thereof, the liquid crystalline polymer comprises a coating on a bead or grit-blasted roughened surface of the component which is mechanically keyed or interlocked with the coating.
Dependencies are inferred from the claim text.