Method of fabricating resistive probe having self-aligned metal shield

A method of fabricating a resistive probe having a self-aligned metal shield, the method comprising:

• forming a resistive tip on a substrate that is doped with a first impurity, the resistive tip comprising a resistive region formed at a peak thereof and lightly doped with a second impurity, which is opposite in polarity to the first impurity, and first and second electrode regions formed on inclined surfaces thereof and heavily doped with the second impurity;
• sequentially forming a first insulating layer and a metal shield on the resistive tip;
• uniformly forming a second insulating layer to cover the metal shield;
• etching the second insulating layer to expose the metal shield on the resistive region;
• etching the exposed metal shield;
• and
• etching the first insulating layer to expose the resistive region.