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US 7,604,918 B2Granted
Photosensitive polymer and photoresist composition having the same
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-jun Choi, Han-ku Cho
Life of this patent
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Abstract
A photosensitive polymer for a photoresist and a photoresist composition having the same are provided. The photosensitive polymer for a photoresist includes the repeating unit represented by the formula below: wherein R1 is a C1-C20 hydrocarbon group or a C1-C20 hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur.
Claims17
A photosensitive polymer, comprising a repeating unit represented by the Structure (I):
- wherein R1 is a C1-C20 hydrocarbon group or a C1-C20 hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur, and
- R1 includes at least one substituent selected from the group shown in Substituent Group (I):
A photosensitive polymer, comprising:
- a repeating unit represented by the Structure (I):
- wherein R1 is a C1-C20 hydrocarbon group or a C1-C20 hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur;
- and
- at least one acid-labile repeating unit selected from the group consisting of acrylate derivatives, methacrylate derivatives, maleic anhydride derivatives, styrene derivatives and norbornene derivatives,
- wherein the acid-labile repeating unit is coupled with a C4-C20 acid-labile substituent.
2 more elements
A photoresist composition, comprising:
- a photosensitive polymer having a repeating unit represented by Structure (I):
- wherein R1 is a C1-C20 hydrocarbon group or a C1-C20 hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur;
- and
- a photoacid generator (PAG) forming 1-20 wt % of the photoresist composition based on a weight of the photosensitive polymer.
1 more element
Dependencies are inferred from the claim text.