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US 7,604,866 B2Granted
Antireflection film
AssigneeAsahi Kasei Kabushiki Kaisha
InventorsToshihiko Ohashi, Takaaki Ioka
Life of this patent
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Abstract
An antireflection film comprising silica particles and at least one binder compound, which has a silica particle content of 30% by weight or more, an arithmetic mean surface roughness (Ra) of not more than 2 nm, and a surface silicon atom content of 10 atom % or more.
Claims18
An antireflection film comprising silica particles and at least one binder compound, wherein said silica particles are bound together through said at least one binder compound,
- said antireflection film having the following characteristics (a) to (c):
- (a) a silica particle content of 30% by weight or more, based on the weight of the antireflection film,
- (b) an arithmetic mean surface roughness (Ra) of not more than 1.5 nm,
- (c) a silicon atom content of 10 atom % or more, as measured by X-ray photoelectron spectroscopy (XPS) with respect to the surface of the antireflection film, and
- (d) a reflectance of not more than 1%.
2 more elements
Dependencies are inferred from the claim text.