Release layer and resist material for master tool and stamper tool
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorsXing-Cai Guo, Dan S. Kercher, Bruno Marchon, Charles M. Mate, Tsai-Wei Wu
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Abstract
Methods of performing nanoimprint lithography are described. For one method, a master tool and a stamper tool are formed to provide nanometer-scale imprinting. A release layer comprised of a perfluoropolyether diacrylate material is formed on the master tool and the stamper tool. The master tool and the stamper tool are used to form patterns in resist material, such as hole or pillar patterns. The resist material as described herein has lower viscosity and lower surface tension than prior resist materials allowing for more uniform replication of the patterns.
Claims10
A method of performing an imprint process, the method comprising:
- fabricating a master tool with a master pattern;
- forming a release layer on the master pattern of the master tool, wherein the release layer on the master pattern comprises a perfluoropolyether diacrylate having a molecular weight between about 1500-2500 atomic mass units;
- pressing the master tool against stamper resist material on a stamper tool to form a stamper pattern on the stamper tool, wherein the stamper resist material is formed from neopentyl glycol dimethacrylate;
- and
- forming a release layer on the stamper pattern, wherein the release layer on the stamper pattern comprises a perfluoropolyether diacrylate having a molecular weight between about 1500-2500 atomic mass units.
A method of performing nanoimprint lithography, the method comprising:
- fabricating a nanometer-scale hole/pillar pattern on a surface of a master tool;
- forming a release layer on the surface of the master tool, wherein the release layer on the master tool comprises a perfluoro polymer having a molecular weight between about 1500-2500 atomic mass units;
- pressing the master tool against stamper resist material on a stamper tool to pattern a corresponding hole/pillar pattern in the stamper resist material of the stamper tool, wherein the stamper resist material is formed from neopentyl glycol dimethacrylate;
- forming a release layer on the stamper tool, wherein the release layer on the stamper tool comprises a perfluoro polymer having a molecular weight between about 1500-2500 atomic mass units;
- pressing the stamper tool against replica resist material on a substrate to pattern a corresponding hole/pillar pattern in the replica resist material;
- and
- performing an etching process to pattern the substrate.
A method of performing nanoimprint lithography, the method comprising:
- fabricating a master pattern on a Silicon (Si) master tool;
- forming an anti-adhesion layer on the Si master tool, wherein the anti-adhesion layer on the Si master tool comprises a perfluoropolyether with diacrylate end groups having a molecular weight between about 1500-2500 atomic mass units, and wherein the diacrylate end groups bond to the Si master tool upon curing;
- pressing the Si master tool against a polymer stamper resist material on a stamper tool to pattern the polymer stamper resist material, wherein the stamper resist material is formed from neopentyl glycol dimethacrylate;
- forming an anti-adhesion layer on the polymer stamper tool, wherein the anti-adhesion layer on the polymer stamper tool comprises a perfluoropolyether with diacrylate end groups having a molecular weight between about 1500-2500 atomic mass units, and wherein the diacrylate end groups bond to the polymer stamper tool upon curing;
- pressing the polymer stamper tool against replica resist material on a substrate to pattern the replica resist material;
- and
- performing an etching process to pattern the substrate.
Dependencies are inferred from the claim text.