Methods and apparatus for selectively removing conductive material from a microelectronic substrate

A method for removing material from a microelectronic substrate, comprising:

• positioning the microelectronic substrate proximate to and spaced apart from an electrode pair that includes a first electrode and a second electrode spaced apart from the first electrode;
• disposing an electrolytic liquid between the electrode pair and the microelectronic substrate;
• removing conductive material from the microelectronic substrate by passing a varying electrical signal through the electrode pair and the electrolytic liquid;
• and
• at least restricting a flow of the electrolytic liquid away from the electrode pair by contacting a seal member with the microelectronic substrate proximate to the electrode pair, the seal member at least partially enclosing the electrode pair.

An apparatus for removing a conductive material from a microelectronic substrate, comprising:

• a carrier configured to removably carry a microelectronic substrate with a peripheral edge surface at a removal region;
• an electrode pair positioned in the removal region, the electrode pair including a first electrode and a second electrode spaced apart from the first electrode, at least one of the electrodes being coupleable to a varying electrical signal transmitter;
• wherein
• at least one of the carrier and the electrode pair is moveable relative to the other to pass the electrode pair proximate to the peripheral edge of the microelectronic substrate when the carrier carries the microelectronic substrate;
• and
• a seal at least partially enclosing the electrode pair, the seal being configured to at least restrict liquid motion of an electrolytic liquid away from the peripheral edge surface.

An apparatus for removing material from a microelectronic substrate, comprising:

• a carrier configured to removably carry a microelectronic substrate;
• a first electrode positioned proximate to the carrier;
• a second electrode positioned proximate to the carrier and spaced apart from the first electrode, at least one of the electrodes being coupleable to a varying electrical signal transmitter;
• a flow passage having an exit aperture positioned proximate to the first and second electrodes, the flow passage being coupleable to a supply of electrolytic liquid;
• and
• a seal member at least partially enclosing the first and second electrodes, the seal member being positioned at least proximate to the exit aperture of the flow passage and configured to at least restrict a flow of electrolytic liquid away from the first and second electrodes.