Methods and apparatus for generating high-density plasma
AssigneeZond, Inc.
InventorRoman Chistyakov
Life of this patent
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Abstract
Methods and apparatus for generating a strongly-ionized plasma are described. An apparatus for generating a strongly-ionized plasma according to the present invention includes an anode and a cathode that is positioned adjacent to the anode to form a gap there between. An ionization source generates a weakly-ionized plasma proximate to the cathode. A power supply produces an electric field in the gap between the anode and the cathode. The electric field generates excited atoms in the weakly-ionized plasma and generates secondary electrons from the cathode. The secondary electrons ionize the excited atoms, thereby creating the strongly-ionized plasma.
Claims33
An apparatus for generating a strongly-ionized plasma, the apparatus comprising:
- a. an ionization source that generates a weakly-ionized plasma from a feed gas contained in a chamber, the weakly-ionized plasma substantially eliminating the probability of developing an electrical breakdown condition in the chamber;
- and
- b. a power supply that supplies power to the weakly-ionized plasma though an electrical pulse that is applied across the weakly-ionized plasma, the electrical pulse having at least one of a magnitude and a rise-time that is sufficient to transform the weakly-ionized plasma to a strongly-ionized plasma without developing an electrical breakdown condition in the chamber.
A method for generating a strongly-ionized plasma, the method comprising:
- a. ionizing a feed gas in a chamber to form a weakly-ionized plasma that substantially eliminates the probability of developing an electrical breakdown condition in the chamber;
- and
- b. supplying an electrical pulse across the weakly-ionized plasma that excites atoms in the weakly-ionized plasma, thereby generating a strongly-ionized plasma without developing an electrical breakdown condition in the chamber.
An apparatus for generating a strongly-ionized plasma, the apparatus comprising:
- a. an anode;
- b. a cathode that is positioned adjacent to the anode;
- c. an ionization source that generates a weakly-ionized plasma proximate to the cathode, the weakly-ionized plasma substantially eliminating the probability of developing an electrical breakdown condition between the anode and the cathode;
- and
- d. a power supply that is electrically coupled to the anode and to the cathode, the power supply generating an electric field that excites atoms in the weakly-ionized plasma, thereby forming a strongly-ionized plasma without developing an electrical breakdown condition in the chamber.
An apparatus for generating a strongly-ionized plasma, the apparatus comprising:
- a. means for ionizing a feed gas in a chamber to form a weakly-ionized plasma that substantially eliminates the probability of developing an electrical breakdown condition in the chamber;
- and
- b. means for supplying an electrical pulse across the weakly-ionized plasma to transform the weakly-ionized plasma to a strongly-ionized plasma without developing an electrical breakdown condition in the chamber.
Dependencies are inferred from the claim text.