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US 7,604,701 B2Granted
Method and apparatus for removing external components from a process chamber without compromising process vacuum
AssigneeTokyo Electron Limited
InventorSteven T Fink
Life of this patent
Estimating the term…
Abstract
An access assembly for a process chamber, including a wall segment constructed and arranged to access the process chamber, a mounting assembly constructed and arranged to couple the wall segment to the process chamber, and a sealing plate mounted to the process chamber. The sealing plate is constructed and arranged to isolate the wall segment from a volume inside the process chamber.
Claims34
An access assembly for a process chamber, comprising:
- a segment of a wall of said process chamber;
- a mounting assembly constructed and arranged to couple said segment to said process chamber, wherein said mounting assembly comprises a mounting ring;
- a sealing plate mounted to the inside of said process chamber;
- a plurality of attachment devices to secure said mounting ring to said process chamber;
- a pivot assembly mounting said sealing plate to said wall of said process chamber;
- a sealing O-ring mounted to a surface of the sealing plate that mates to an internal surface of the wall of said process chamber,
- wherein said sealing plate is constructed and arranged to selectively seal said segment from a volume inside said process chamber.
4 more elements
Dependencies are inferred from the claim text.