Inlaid polishing pad
AssigneeIV Technologies CO., Ltd.
InventorWen-Chang Shih
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Abstract
A surface treatment or a two-step injection molding is used to make an inlaid polishing pad. A surface of the inlaid polishing pad has areas of different rigidity to control the rigidity and compressibility of the inlaid polishing pad. Furthermore, methods of making such an inlaid polishing pads are also disclosed.
Claims27
An inlaid polishing pad, comprising:
- a body comprising a first polymer;
- a polishing surface on one side of the body;
- a mounting surface on the other side of the body;
- and
- at least an inlaid layer inlaid in the polishing surface and/or the mounting surface, the inlaid layer comprising a second polymer,
- wherein the rigidity of the second polymer and the rigidity of the first polymer are different,
- wherein the second polymer is made by illuminating the first polymer to proceed a photo-polymerization reaction, heating the first polymer to increase cross-linkage, or irradiating the first polymer to generate a more cross-linked structure.
An inlaid polishing pad for chemical mechanical polishing (CMP), the inlaid polishing pad being divided into at least a sector of a first region and at least a sector of a second region comprising an inlaid layer inlaid in a unitary body, wherein the first and second regions are alternately arranged such that, during planarization of a substrate by CMP, the substrate passes the first and second regions sequentially, wherein the inlaid layer is made by illuminating the unitary body to proceed a photo-polymerization reaction, heating the unitary body to increase cross-linkage, or irradiating the unitary body to generate a more cross-linked structure.
An inlaid polishing pad, comprising:
- a body comprising a first polymer;
- a polishing surface on one side of the body;
- a mounting surface on the other side of the body;
- and
- at least an inlaid layer inlaid in the polishing surface and/or the mounting surface, the inlaid layer comprising a second polymer, wherein the second polymer is made by illuminating the first polymer to proceed a photo-polymerization reaction, heating the first polymer to increase cross-linkage, or irradiating the first polymer to generate a more cross-linked structure.
Dependencies are inferred from the claim text.