Equipment front end module
AssigneeKLA-Tencor Technologies Corporation
InventorFarrokh Kaveh
Life of this patent
Estimating the term…
Abstract
Equipment front end module (EFEM) systems and methods for handling workpieces at EFEMs are disclosed. An equipment front end module (EFEM) system has an enclosure and a robot within the enclosure. The enclosure has two or more load ports, each being adapted to receive a front opening unified pod (FOUP). The robot is configured to move work pieces between the FOUP(s) and one or more work piece processing tools proximate the enclosure. The load ports are positioned relative to said robot such that said robot can move the work pieces between the tool and a FOUP at each load port with a simple R-theta motion or pure linear motion with respect to two axes.
Claims25
An equipment front end module (EFEM) system, comprising:
- an enclosure having two or more load ports located outside the enclosure, wherein each load port is adapted to receive a front opening unified pod (FOUP) from an automated materials handling system (AMHS), wherein each of said load ports includes a loading mechanism located outside the enclosure adjacent a wall of the enclosure, wherein the loading mechanism is configured to rotate a FOUP received from the automated materials handling system (AMHS), such that a front opening of the FOUP lines up with an opening in the wall of the enclosure, wherein said two or more load ports include first and second load ports that are arranged in a configuration other than a side-by-side configuration, and wherein a storage location is located at a corner of the enclosure between two of the load ports;
- a robot within the enclosure, wherein the robot is configured to move work pieces between the FOUP(s) and one or more work piece processing tools proximate the enclosure;
- wherein said load ports are positioned relative to said robot such that said robot can move the work pieces between said one or more work piece processing tools and a FOUP at each load port with R-theta motion or linear motion with respect to two axes while the FOUP remains outside the enclosure.
A method for handling work pieces at an equipment front end module (EFEM), comprising the steps of:
- receiving a front opening unified pod (FOUP) from an automated materials handling system (AMHS) at any of two or more load ports of the EFEM located outside an enclosure of the EFEM, wherein said two or more load ports include first and second load ports that are arranged in a configuration other than a side-by-side configuration, and wherein a storage location is located at a corner of the enclosure between the first and second load ports, wherein receiving the FOUP at the EFEM includes delivering the FOUP with an overhead track or automated guided vehicle and rotating the FOUP using a loading mechanism included in one of the load ports to align the FOUP with an opening of the EFEM;
- and
- moving the work piece in R-theta motion between the FOUP and a work piece processing tool, while the FOUP remains outside the enclosure.
An apparatus for handling work pieces at an equipment front end module (EFEM), comprising:
- means for receiving a front opening unified pod (FOUP) from an automated materials handling system (AMHS) at any of two or more load ports of the EFEM located outside an enclosure of the EFEM, wherein said two or more load ports include first and second load ports that are arranged in a configuration other than a side-by-side configuration, and wherein a storage location is located at a corner of the enclosure between two of the load ports;
- FOUP rotating means included in one or more load ports located outside an enclosure of the EFEM for rotating the FOUP to align the FOUP with an opening in the EFEM and to rotate the FOUP to align the FOUP with an automated material handling system;
- and
- means for moving the work piece in R-theta motion between the FOUP and a work piece processing tool while the FOUP remains outside the enclosure.
Dependencies are inferred from the claim text.