Substrate temperature measurement apparatus and processing apparatus
AssigneeUL Vac, Inc.
InventorYoshinori Fujii
Life of this patent
Estimating the term…
Abstract
A substrate temperature measurement apparatus and a processing apparatus, whereby thermocouple wire reliability is improved, influence of infrared rays on the chip is reduced and the temperature of the substrate can be accurately measured. A chip (16) made of metal material reflecting infrared rays and electromagnetic waves, has an insertion opening (16a) for inserting thermocouple wires (20a, 20b) is crushed and deformed with the thermocouple wires inserted, and thereby united together with the thermocouple wires, and contacted with the substrate (13); and a supporting member or members (15b, 15c), made of material of lower thermal conductivity than said chip (16), are provided for supporting said chip (16).
Claims13
A substrate temperature apparatus for measuring the temperature of a substrate, said apparatus comprising:
- a chip made of metal material reflecting infrared rays and other electromagnetic waves;
- said chip having an insertion opening for inserting thermocouple wires and which chip is crushed and thereby deformed with said thermocouple wires inserted to unite said chip together with said thermocouple wires;
- said chip contacted with said substrate;
- and
- a supporting member or members, made of material of lower thermal conductivity than said chip, supporting said chip.
A method for measuring the temperature of a substrate, the method comprising:
- providing a chip of metal material which reflects infrared rays and other electromagnetic waves;
- inserting thermocouple wires into an insertion opening provided in said chip;
- crushing and thereby deforming said chip with said thermocouple wires inserted to unite said chip and said thermocouple wires together;
- contacting said crushed chip with said substrate;
- and
- supporting said chip with a material of lower thermal conductivity than said chip.
Dependencies are inferred from the claim text.