Deformable mirror device and apparatus for observing retina of eye

A deformable mirror device comprising:

• a substrate;
• a plurality of electrodes provided on the substrate;
• a spacer disposed on the substrate;
• a support member disposed above the spacer and having an opening passing through from a first face of the support member facing to the substrate to a second face of the support member facing opposite from the first face;
• a first insulation film provided on the first face of the support member;
• a second insulation film provided on the second face of the support member;
• and
• a deformable electrode film disposed so as to be opposed to the electrodes at a spacing, formed so as to cover the opening, and supported by the support member with sandwiching the first insulation film,
• wherein the electrode film comprises a reflection portion on a face opposite from the electrodes, and the support member is disposed above the substrate with sandwiching the electrode film, the first insulation film and the spacer, and wherein
• the support member comprises silicon,
• the first and second insulation films comprise silicon oxide, and
• the electrode film comprises a silicon film with impurities introduced therein.