Piezoelectric element, method of manufacturing the piezoelectric element, and liquid ejecting head
AssigneeSeiko Epson Corporation
InventorTakeshi Saito
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Abstract
A piezoelectric element includes a lower electrode film formed on one surface of a substrate, a piezoelectric layer made of a piezoelectric material and disposed on the lower electrode film, and an upper electrode film disposed on the piezoelectric layer, in which the lower electrode film contains platinum, titanium, iridium, and oxygen, and the lower electrode film includes a first layer disposed on the substrate and containing platinum as a primary component, a second layer disposed on the first layer and containing titanium as a primary component, and a third layer disposed on the second layer and containing iridium as a primary component.
Claims5
A piezoelectric element, comprising:
- a first electrode film formed on one surface of a substrate;
- a piezoelectric layer made of a piezoelectric material and disposed on the first electrode film;
- and
- an second electrode film disposed on the piezoelectric layer,
- wherein the first electrode film contains platinum, titanium, iridium, and oxygen, and
- wherein the first electrode film includes a first layer disposed on the substrate and containing platinum as a primary component, a second layer disposed on the first layer and containing titanium as a primary component, and a third layer disposed on the second layer and containing iridium as a primary component.
A method of manufacturing a piezoelectric element, comprising:
- forming a first electrode film by sequentially stacking an adhesion layer made of titanium, a platinum layer made of platinum, and a diffusion barrier layer made of iridium where a thickness ratio of the adhesion layer, the platinum layer, and the diffusion barrier layer is 1:4 to 6:0.5 to 1;
- forming a piezoelectric precursor film made of a piezoelectric material on the first electrode film while forming a piezoelectric layer formed of a piezoelectric film which is obtained by crystallizing the piezoelectric precursor film by a calcining process;
- and
- forming an second electrode film on the piezoelectric layer.
Dependencies are inferred from the claim text.