Liquid-jet head, method of manufacturing the same and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorMasataka Yamada
Life of this patent
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Abstract
Included are a passage-forming substrate in which pressure generating chambers communicating respectively with nozzle orifices from which to eject ink droplets are formed; piezoelectric elements which are provided to one surface of the passage-forming substrate, and each of which is configured of a lower electrode, a piezoelectric layer and an upper electrode; and an insulation film which are provided at least areas corresponding to the piezoelectric elements in order that the insulation film can cover the piezoelectric elements, and which is made of an aluminum oxide thin film containing nitrogen.
Claims6
A liquid-jet head comprising:
- a passage-forming substrate in which pressure generating chambers are formed, the pressure generating chambers communicating respectively with nozzle orifices from which to eject liquid droplets;
- piezoelectric elements which are provided to one surface of the passage-forming substrate with a vibration plate interposed between the passage-forming substrate and each of the piezoelectric elements, the piezoelectric elements being configured of a lower electrode, piezoelectric layers and upper electrodes;
- and
- an insulation film made of an aluminum oxide thin film containing nitrogen, which is provided to at least areas corresponding to the piezoelectric elements and covers the piezoelectric elements,
- wherein an amount of the nitrogen contained in the insulation film is 1 wt % to 3 wt %.
A liquid-jet head comprising:
- a passage-forming substrate in which pressure generating chambers are formed, the pressure generating chambers communicating respectively with nozzle orifices from which to eject liquid droplets;
- piezoelectric elements which are provided to one surface of the passage-forming substrate with a vibration plate interposed between the passage-forming substrate and each of the piezoelectric elements, the piezoelectric elements being configured of a lower electrode, piezoelectric layers and upper electrodes;
- and
- an insulation film made of an aluminum oxide thin film containing nitrogen, which is provided to at least areas corresponding to the piezoelectric elements and covers the piezoelectric elements,
- wherein the nitrogen contained in the insulation film is present in a way that the nitrogen is segregated in a vicinity of a surface layer of the insulation film.
A liquid-jet head comprising:
- a passage-forming substrate in which pressure generating chambers are formed, the pressure generating chambers communicating respectively with nozzle orifices from which to eject liquid droplets;
- piezoelectric elements which are provided to one surface of the passage-forming substrate and
- an insulation film containing nitrogen, which is provided to at least areas corresponding to the piezoelectric elements and covers the piezoelectric elements,
- wherein the nitrogen is segregated in a vicinity of a surface layer of the insulation film.
A liquid-jet head comprising:
- a passage-forming substrate in which pressure generating chambers are formed, the pressure generating chambers communicating respectively with nozzle orifices from which to eject liquid droplets;
- a piezoelectric elements which are provided to one surface of the passage-forming substrate and
- an insulation film containing a resistant element having resistance to chemical liquids, which is provided to at least areas corresponding to the piezoelectric elements and covers the piezoelectric elements,
- wherein the resistant element is segregated in a vicinity of a surface layer of the insulation film.
Dependencies are inferred from the claim text.