Rotary type CVD film forming apparatus for mass production

A rotary type CVD film forming apparatus for mass production, comprising:

• a film forming chamber including:
• one columnar body serving as an external electrode and including a plurality of housing spaces for housing one plastic container each in one said housing space so that the central axis of each of said housing spaces is parallel with the central axis of said external electrode and said housing spaces are arranged side by side on the same circle which uses the central axis of the external electrode as a center point,
• internal electrodes arranged to be freely inserted from the mouth portion into the inside of the plastic containers loaded in each of said housing spaces,
• an insulating member to form an insulating state between the internal electrodes and the external electrode when said internal electrodes are inserted inside said plastic containers, and
• a cover which is closed for reducing the pressure inside said housing spaces,
• wherein a plurality of said film forming chambers is arranged on a rotation support body at equal intervals in a circular state;
• source gas introduction means which introduce a source gas that is converted to plasma inside the plastic containers housed in each of said film forming chambers;
• high frequency supply means which supply a high frequency to the external electrode of each of said film forming chambers;
• and
• high frequency distribution means which switch the high frequency supply on and off independently for each external electrode to form a CVD (chemical vapor deposition) film on the internal surfaces of said plastic containers.