Piezoelectric sensor
AssigneePiezocryst Advanced Sensorics GmbH
InventorsDietmar Kröger, Michael Hirschler, Alexander Friedl, Alexander Schricker, Ferdinand Krispel, Wolfgang Michelitsch
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Abstract
A piezoelectric sensor, preferably a pressure sensor, comprising at least two piezoelectric measuring elements placed in a housing, which are clamped between a membrane on the pressured side of the housing and a pick-up electrode electrically insulated against the housing. The piezoelectric measuring elements are fixedly attached to the pick-up electrode by thermo-compression or soldering and together with said pick-up electrode form a compact measuring element stack, which will significantly simplify assembly of the piezoelectric sensor.
Claims13
A piezoelectric sensor comprising at least two piezoelectric measuring elements located in a housing and which are clamped between a membrane on a pressured side of the housing and a pick-up electrode electrically insulated against the housing,
- wherein the piezoelectric measuring elements are lamella-shaped having adjacent side faces and narrow sides and, in order to make use of transversal piezoeffect, are each attached with one of the narrow sides to the pick-up electrode by thermo-compression or soldering to form a compact measuring element stack together with said pick-up electrode, and
- wherein the piezoelectric measuring elements are stacked and are positioned to define an air gap between adjacent side faces.
A piezoelectric sensor comprising at least two piezoelectric measuring elements located in a housing and which are clamped between a membrane on a pressured side of the housing and a pick-up electrode electrically insulated against the housing,
- wherein the piezoelectric measuring elements are lamella-shaped having side faces and, in order to making use of longitudinal piezoeffect, are each fixedly attached with a side face to the pick-up electrode by thermo-compression or soldering to form a compact measuring element stack together with said pick-up electrode, and wherein the pick-up electrode is disk-shaped and two piezoelectric measuring elements are attached to opposite sides of the disk-shaped pick-up electrode.
Dependencies are inferred from the claim text.