Air bearing assembly for guiding motion of optical components of a laser processing system
AssigneeElectro Scientific Industries, Inc.
InventorMark T. Kosmowski
Life of this patent
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Abstract
A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.
Claims7
In a laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support, the lens forming a focal region of the laser beam and the support operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface, the improvement comprising:
- an air bearing assembly including an air bushing that contains the lens and guides its movement along the beam axis in response to a motive force applied to the lens to adjust the focal region of the laser beam relative to the work surface.
In a laser processing system in which a laser beam propagates along a beam axis and through a lens for incidence on a work surface of a target specimen mounted on a support, the lens forming a focal region of the laser beam and the support operatively connected to a multiple-axis positioning system that moves the laser beam and the target specimen relative to each other to position the laser beam at selected locations on the work surface, the improvement comprising:
- an air bearing assembly including an air bushing that contains the lens and guides its movement along the beam axis in response to a motive force applied to the lens;
- and
- a lens forcer including a movable member that is guided for movement along the beam axis and is operatively connected to the lens to impart the motive force to move the lens along the beam axis and thereby adjust the focal region of the laser beam relative to the work surface.
Dependencies are inferred from the claim text.