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US 7,602,127 B2Granted
Phase and frequency control of a radio frequency generator from an external source
AssigneeMKS Instruments, Inc.
InventorDavid J. Coumou
Life of this patent
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Abstract
Controlling a phase and/or a frequency of a RF generator. The RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit controls the phase and/or the frequency of a RF generator.
Claims11
A radio frequency (RF) system comprising:
- a first agile frequency RF generator including:
- a power source;
- a sensor coupled to the power source;
- and
- a sensor signal processing unit coupled to the power source and to the sensor, the sensor signal processing unit adapted to receive an input from an external source and to generate a first control signal controlling at least one of a first phase and a first frequency of a RF power signal from the first RF generator;
- and
- a second agile frequency RF generator operable to receive a second control signal from the first RF generator, the second control signal controls at least one of a second phase and a second frequency of the second RF generator.
4 more elements
A RF system comprising:
- a first RF generator;
- and
- a second RF generator coupled to the first RF generator, the first and the second RF generators each including:
- a power source;
- a sensor coupled to the power source;
- a sensor signal processing unit coupled to the power source and to the sensor,
- wherein the sensor signal processing unit for the first RF generator controls a phase and a frequency of the first RF generator and the sensor signal processing unit for the second RF generator control a phase and a frequency of the second RF generator.
4 more elements
A method comprising:
- coupling a sensor to a power source;
- coupling a sensor signal processing unit to the power source and to the sensor;
- receiving an input from an external source;
- generating a control signal to control phase and frequency of a RF generator;
- taking a derivative of a phase and frequency signal;
- calculating frequency of a signal based on the derivative;
- summing a frequency offset with the derivative;
- updating a frequency error at a controller;
- and
- sending a mixed frequency error to a digital frequency synthesizer from the controller.
7 more elements
Dependencies are inferred from the claim text.