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US 7,599,058 B2Granted
Methods for plasma diagnostics and the measurement of thin films
AssigneeLam Research Corporation
InventorsDavid Craven, Ryan Roberts
Life of this patent
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Abstract
Methods for obtaining and analyzing data from a spectral source is provided. The method includes identifying an environment that is capable of generating spectral information, and obtaining the generated spectral information from the environment. The method further includes splitting the generated spectral information into a plurality of spectral data units. The spectral data units are further captured in separate storage entities and separately processed in parallel in order to produce a complete processing and quantification of the environment.
Claims17
A method for obtaining data from a spectral source, comprising:
- identifying an environment that is capable of generating spectral information;
- obtaining the generated spectral information from the environment from one location of the environment;
- for the spectral information obtained from the one location, splitting the generated spectral information into a plurality of spectral data units that are tuned to register particular bands of wavelengths from a visible electromagnetic spectrum, wherein the splitting the generated spectral information includes rotating a shutter to enable capturing the particular bands of wavelengths for each of the spectral data units;
- capturing the particular bands of wavelengths for each of the spectral data units in separate storage entities;
- separately and in parallel processing each of the particular bands of wavelengths of the plurality of spectral data units;
- and
- combining an output of the processing to produce a complete processing of the particular bands of wavelengths of the plurality of spectral data units, the complete processing defining a quantification of the environment from the one location.
4 more elements
A method for obtaining data from a spectral source, comprising:
- identifying an environment that is capable of generating spectral information;
- obtaining the generated spectral information from the environment from one location of the environment;
- for the spectral information obtained from the one location, splitting the generated spectral information into a plurality of spectral data units that are tuned to register particular bands of wavelengths from a visible electromagnetic spectrum, wherein the splitting the generated spectral information includes, rotating a mirror ball to enable capturing the particular bands of wavelengths for each of the spectral data units;
- capturing the particular bands of wavelengths for each of the spectral data units in separate storage entities;
- separately and in parallel processing each of the particular bands of wavelengths of the plurality of spectral data units;
- and
- combining an output of the processing to produce a complete processing of the particular bands of wavelengths of the plurality of spectral data units, the complete processing defining a quantification of the environment from the one location.
4 more elements
A method for obtaining data from a spectral source, comprising:
- identifying an environment that is capable of generating spectral information;
- obtaining the generated spectral information from the environment from one location of the environment;
- for the spectral information obtained from the one location, splitting the generated spectral information into a plurality of spectral data units that are tuned to register particular bands of wavelengths from a visible electromagnetic spectrum, wherein the splitting the generated spectral information includes, scanning a mirror to enable capturing the particular bands of wavelengths for each of the spectral data units;
- capturing the particular bands of wavelengths for each of the spectral data units in separate storage entities;
- separately and in parallel processing each of the particular bands of wavelengths of the plurality of spectral data units;
- and
- combining an output of the processing to produce a complete processing of the particular bands of wavelengths of the plurality of spectral data units, the complete processing defining a Quantification of the environment from the one location.
4 more elements
A method for obtaining data from a spectral source and providing analysis of the obtained data, comprising:
- identifying an environment chamber that is capable of generating spectral information from plasma processing;
- obtaining the generated spectral information from the environment chamber from one location of the environment chamber during plasma processing;
- splitting the generated spectral information into a plurality of spectral data units that are tuned to include only particular bands of wavelengths from a visible electromagnetic spectrum, the generated spectral information obtained from the one location of the environment chamber;
- capturing the particular bands of wavelengths for each of the spectral data units in separate storage entities;
- storing the a defined number of pixels for the captured particular bands of wavelengths in the separate storage entities;
- separately and in parallel processing each one of the particular bands of wavelengths of the plurality of spectral data units;
- and
- combining the separately processed particular bands of wavelengths to produce a complete processing of the particular bands of wavelengths of the plurality of spectral data units, the complete processing defining a quantification of the environment chamber from the one location during the plasma processing;
- wherein the splitting the generated spectral information includes rotating a shutter, rotating a minor ball, moving a reflective surface, or scanning a mirror to enable capturing the particular bands of wavelengths for each of the spectral data units.
6 more elements
Dependencies are inferred from the claim text.