Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator

A flap resonator, comprising a first electrode and a second electrode, the second electrode comprising a support part separated from an adjacent end of the first electrode by a dielectric part, and a beam part extending from said support part and over at least a part of a surface of the first electrode, whereby there is a gap between said beam part and said surface of the first electrode, whereby the first electrode and the second electrode are arranged so that when an electrical signal is applied to said electrodes, the beam part will vibrate producing a varying capacitance between said beam part and the first electrode;

• wherein the beam part has a first width in a direction parallel to its connection to the support part;
• the support part has an effective width in said direction, said effective width being smaller than said first width;
• and
• the support part has said effective width, smaller that said first width, at least in a part of an area that is not in contact with the dielectric part.