Probe card head protection device for wafer sort set up
AssigneeXilinx, Inc.
InventorsElvin P. Dang, Mohsen Hossein Mardi
Life of this patent
Estimating the term…
Abstract
A protective mechanism for a probe card cover to prevent the probe card cover or attachment screws extending from the probe card cover from striking a wafer in a test system if the probe card is installed without removing the cover. The protective mechanism includes an elongate member that can be permanently attached to the probe card cover, or attached by screws to the probe card cover. The protective mechanism can be a bar that extends longer than an opening in a probe card holder tray through which probes of the probe card pass during testing. The bar can be hard, yet flexible enough to prevent damage to the probe card holder tray or probe card.
Claims14
A system, comprising:
- a probe card;
- a probe card cover to prevent damage to probes on the probe card, the probe card cover being detachably coupled to the probe card to cover the probes;
- an elongate protective structure having a length extending longer than the probe card cover, the elongate protective structure being attached to the probe card cover;
- and
- a probe card holder tray for mounting the probe card when the probe card is being used to test components on a wafer, wherein the length of the elongate protective structure is greater than a length of an opening in the probe card holder tray to prevent any portion of the probe card cover from extending within any portion of the opening in the probe card holder tray.
A method for protecting a probe card comprising attaching a bar to a probe card cover of the probe card, wherein the bar extends longer than an opening in a probe card holder tray for mounting the probe card, and wherein at least a portion of the probe card cover extends through the opening in the probe card holder tray when the bar is not attached, and wherein any portion of the probe card cover is prevented from extending within any portion of the opening in the probe card holder tray when the bar is attached.
Dependencies are inferred from the claim text.