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US 7,598,595 B2Granted
Fabrication of nanoporous antireflection film
AssigneeIndustrial Technology Research Institute
InventorsKuei-jung Chao, Kuo-ying Huang, Shu Fang Chen
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Abstract
A nanoporous antireflection coating preparation method. A sol-gel precursor solution containing an organic template is coated onto a substrate. The sol-gel precursor solution containing the organic template is dried into a film. The organic template within the film is then removed to form a nanoporous antireflection coating. In preferred embodiments, the organic template is removed by UV—O3 treatment at ambient temperature.
Claims4
A nanoporous antireflection film, which is fabricated by a method comprising the following steps:
- providing a substrate;
- preparing a precursor comprising organic template and a metallic/metalloid salt or alkoxide;
- forming a coating of the precursor on the substrate;
- curing the coating, thereby forming a film;
- and
- removing the template from the film to leave a nanoporous antireflection film;
- wherein the antireflection film has a reflectivity of less than 10% and a transmittance of more than 90%.
4 more elements
Dependencies are inferred from the claim text.