Infrared solid-state image pickup apparatus and a production method thereof
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsYasuaki Ohta, Masashi Ueno
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Abstract
An infrared solid-state image pickup apparatus includes an SOI substrate having a silicon oxide film layer and an SOI layer on a silicon substrate, a detecting portion which is provided with a PN junction diode formed on the SOI substrate and converts a temperature change generated by an incident infrared ray to an electric signal, and a support that holds the detecting portion with a space from the silicon substrate of the SOI substrate. An impurity in a semiconductor layer constituting the PN junction diode is distributed such that carriers flowing in the semiconductor layer are distributed in such an uneven manner as being much in a central portion of the semiconductor layer than in a peripheral portion thereof.
Claims9
An infrared solid-state image pickup apparatus, comprising:
- an SOI substrate having a silicon oxide film layer and an SOI layer on a silicon substrate;
- a detecting portion, which is provided with a PN junction diode formed on the SOI substrate, and converts a temperature change generated by an incident infrared ray to an electric signal;
- and
- a support that holds the detecting portion with a space from the silicon substrate of the SOI substrate, wherein
- a semiconductor layer constituting the PN junction diode has a first doped side and a second doped side doped oppositely to the first doped side, the second doped side having a layered structure, as viewed from a cross section perpendicular to a current flowing direction of the PN junction diode, and
- an impurity is distributed in the semiconductor layer such that major carriers or excessive minority carriers flowing in the semiconductor layer flow more in a central layer of the second doped side of the semiconductor layer than in a peripheral layer thereof as viewed from said cross section perpendicular to said current flowing direction.
Dependencies are inferred from the claim text.