Semiconductor device, SRAM and manufacturing method of semiconductor device
AssigneeRenesas Technology Corp.
InventorsYuuichi Hirano, Takashi Ipposhi
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AssigneeRenesas Technology Corp.
InventorsYuuichi Hirano, Takashi Ipposhi
Estimating the term…
A semiconductor device according to the present invention is provided with an SOI substrate, an active region, a first insulating film (complete separation insulating film), a second insulating film (partial separation insulating film), and a contact portion. Here, the active region is formed within the surface of the SOI layer. In addition, the first insulating film is formed on one side of the active region from the surface of SOI layer to the buried insulating film. In addition, the second insulating film is formed on the other side of the active region from the surface of SOI layer to a predetermined depth that does not reach the buried insulating film. In addition, the contact portion is provided toward the side where the first insulating film exists, off the center of the active region in a plan view.
An SRAM comprising:
The SRAM further comprising:
Dependencies are inferred from the claim text.