Semiconductor storage device, manufacturing method therefor, and portable electronic equipment
AssigneeSharp Kabushiki Kaisha
InventorsHiroshi Iwata, Akihide Shibata, Masayuki Nakano
Life of this patent
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Abstract
A semiconductor storage device has a semiconductor layer having a first conductivity type region and two second conductivity type regions separated from each other by the first conductivity type region, a memory function body formed on a surface of the semiconductor layer, and a gate electrode. The memory function body has a charge storage insulator and a charge retention insulator positioned between the charge storage insulator and the semiconductor layer, and doubles as a gate insulating film. The charge retention insulator contains such impurity atoms (phosphorus) as would cause an intrinsic semiconductor to be of the second conductivity type.
Claims15
A semiconductor storage device, comprising:
- a semiconductor layer having, at a surface portion thereof, a first conductivity type region and two second conductivity type regions separated from each other by the first conductivity type region;
- a memory function body formed on a surface of the semiconductor layer and having a function of storing electric charges;
- and
- a gate electrode provided above the first conductivity type region of the semiconductor layer,
- wherein the memory function body has a charge storage insulator having a function of storing electric charges, and a charge retention insulator positioned between the charge storage insulator and the semiconductor layer and having a function of retaining electric charges stored in the charge storage insulator, and
- wherein such impurity atoms as would cause an intrinsic semiconductor to be of the second conductivity type are present between the charge storage insulator and a preset depth location within the first conductivity type region of the semiconductor layer,
- wherein at least some of the impurity atoms are present in the charge retention insulator.
Dependencies are inferred from the claim text.