Ferroelectric memory device
AssigneePanasonic Corporation
InventorsTakumi Mikawa, Yuji Judai
Life of this patent
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Abstract
A semiconductor device includes: first and second conductive layers; a first insulating film; a first plug; a second insulating film; a first opening; and a capacitor constituted by a lower electrode made of a first metal film formed on the wall and bottom of the first opening and electrically connected to the upper end of the first plug, a capacitive dielectric film made of a ferroelectric film formed on the lower electrode, and an upper electrode made of a second metal film formed on the capacitive dielectric film. The second conductive layer and the upper electrode are electrically connected to each other in the first and second insulating films.
Claims12
A semiconductor device, comprising:
- first and second conductive layers spaced and formed in a semiconductor substrate;
- a first insulating film formed on the semiconductor substrate, the first conductive layer and the second conductive layer;
- a first plug formed through the first insulating flim;
- a second plug formed through the first insulating flim;
- a second insulating film formed on the first insulating film and having a first opening above the first plug and a second opening above the second plug;
- a lower electrode made of a first metal film formed on a wall and a bottom of the first opening, having a bend portion at a boundary between the wall and the bottom, and electrically connected to the first plug;
- a capacitive dielectric film made of a ferroelectric film formed on the lower electrode, and
- an upper electrode made of a second metal film formed on the capacitive dielectric film and above the lower electrode,
- wherein the second metal film extends from above the capacitive dielectric film to the second opening and is electrically connected to the second plug in the second opening, and
- an aperture size of the second opening is smaller than an aperture size of the first opening at a same distance from the substrate.
Dependencies are inferred from the claim text.