Semiconductor chip having a soldering layer sequence, and process for soldering a semiconductor chip
AssigneeOSRAM Opto Semiconductors GmbH
InventorsAndreas Ploessl, Stefan Illek, Vincent Grolier
Life of this patent
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Abstract
A semiconductor chip (1), to which a layer sequence (2) intended for the production of a soldered connection has been applied. The layer sequence (2) comprises a solder layer (15) and an oxidation prevention layer (17), which follows the solder layer (15) as seen from the semiconductor chip (1). A barrier layer (16) is included between the solder layer (15) and the oxidation prevention layer (17). This prevents a constituent of the solder layer (15) from diffusing through the oxidation prevention layer (17) prior to the soldering operation, where it would effect oxidation that is disadvantageous for producing a soldered connection.
Claims29
A semiconductor chip structure comprising:
- a semiconductor chip, and
- a layer sequence applied to the semiconductor chip for producing a soldered connection,
- wherein the layer sequence comprises a solder layer and an oxidation prevention layer, which is arranged on a side of the solder layer facing away from the semiconductor chip, and
- wherein a barrier layer is included between the solder layer and the oxidation prevention layer, the barrier layer having a thickness of at least 5 nm and less than 100 nm.
A process for forming a soldered connection between a carrier and a semiconductor chip, the process comprising:
- providing a layer sequence to one of the carrier and the semiconductor chip for producing the soldered connection, wherein the layer sequence comprises a solder layer and an oxidation prevention layer, which is arranged on a side of the solder layer facing away from the one of the carrier and the semiconductor chip, a barrier layer being included between the solder layer and the oxidation prevention layer, and
- during the soldering operation, melting the solder layer and mixing the barrier layer and the oxidation prevention layer with the solder layer.
Dependencies are inferred from the claim text.