Electric field lens and ion implanter having the same
AssigneeNissin Ion Equipment Co., Ltd.
InventorTakatoshi Yamashita
Life of this patent
Estimating the term…
Abstract
An electric field lens includes an entrance electrode, an intermediate electrode, and an exit electrode that are arranged in a traveling direction of ion beams. The intermediate electrode is maintained in a positive potential, and the entrance electrode and the exit electrode are maintained in a ground potential. In addition, the electric field lens includes a first control electrode and a second control electrode that are disposed between the entrance electrode and the intermediate electrode and between the intermediate electrode and the exit electrode, respectively and maintained in a negative potential.
Claims7
An electric field lens comprising:
- an entrance electrode, an intermediate electrode, and an exit electrode, which are mutually spaced in a traveling direction of an ion beam, in which the intermediate electrode is maintained in a positive potential and the entrance electrode and the exit electrode are maintained in a potential lower than the intermediate electrode so as to focus the ion beam;
- a first control electrode that is disposed between the intermediate electrode and the entrance electrode and that is maintained in a potential lower than the entrance electrode;
- and
- a second control electrode that is disposed between the intermediate electrode and the exit electrode and that is maintained in a potential lower than the exit electrode.
Dependencies are inferred from the claim text.