Micro-leds
AssigneeUniversity of Strathclyde
InventorsMartin David Dawson, Hoi Wai Choi, Chan-Wook Jeon
Life of this patent
Estimating the term…
Abstract
An array of light emitting devices, each device comprising a sloped wall mesa (24) of luminescent semiconductor material. Extending over the sloped wall mesas (24) is a metal contact (30). The array can be arranged as a parallel addressable system so that all devices (24) can be stimulated to emit light simultaneously. Alternatively, the array can be arranged as a matrix addressable array, in which case individual devices can be selectively stimulated.
Claims13
A method of fabricating an array of light emitting devices using a luminescent semiconductor material, preferably an electro-luminescent semiconductor material, the method comprising:
- defining a plurality of resist masks on the semiconductor material;
- defining a plurality of sloped-wall mesas by removing material around the resist masks, each of the sloped-wall mesas forming a light-emitting device;
- depositing an insulating layer over the surface of the material including the sloped-wall mesas and the resist masks so that the insulating layer conforms to the shape of the mesas;
- removing the resist masks to expose the tops of the mesas, and
- depositing an electrical contact over the tops of the mesas, the electrical contact conforming to the shape of the mesas.
Dependencies are inferred from the claim text.