Method of fabricating organic light emitting display
AssigneeSamsung Mobile Display Co., Ltd.
InventorsMyung-Won Song, Seong-Taek Lee, Byung-Doo Chin, Tae-Min Kang, Jae-Ho Lee, Mu-Hyun Kim
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Abstract
A method of fabricating a donor substrate for a laser induced thermal imaging (LITI) process. A base substrate is prepared. A light-to-heat conversion layer is formed on the base substrate. A buffer layer is formed on the light-to-heat conversion layer. The surface roughness of the buffer layer is increased by treating the surface of the buffer layer. A transfer layer is formed on the surface-treated buffer layer. By using the donor substrate, a patterning process can be performed better during the fabrication of the OLED.
Claims13
A method of fabricating a donor substrate for a laser induced thermal imaging process, comprising:
- preparing a base substrate;
- forming a light-to-heat conversion layer on the base substrate;
- forming a buffer layer on the light-to-heat conversion layer;
- increasing surface roughness of the buffer layer;
- and
- forming a transfer layer on the surface-treated buffer layer.
A method of transferring a pattern forming material to a target substrate, comprising:
- preparing a donor substrate by a process, the process comprising:
- preparing a base substrate;
- forming a light-to-heat conversion layer on the base substrate;
- forming a buffer layer on the light-to-heat conversion layer;
- increasing surface roughness of the buffer layer;
- and
- forming a transfer layer on the surface-treated buffer layer;
- irradiating laser beams on a predetermined region of the donor substrate, said laser beams converted into heat by the light-to-heat conversion layer to transform adhesion properties between the transfer layer and the light-to-heat conversion layer;
- and
- transferring the transfer layer to the target substrate.
A method of transferring a pattern forming material to a target substrate, comprising:
- preparing a donor substrate, said donor substrate comprising a transfer layer, a light-to-heat conversion layer, and a surface-treated buffer layer interposed between said transfer layer and said light-to-heat conversion layer;
- irradiating laser beams on a predetermined region of the donor substrate, said laser beams converted into heat by the light-to-heat conversion layer to transform adhesion properties between the transfer layer and the light-to-heat conversion layer;
- and
- transferring the transfer layer to the target substrate.
Dependencies are inferred from the claim text.