Polymer, resist composition and patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsSeiichiro Tachibana, Takeru Watanabe, Tsunehiro Nishi
Life of this patent
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Abstract
A (meth)acrylic copolymer is endowed with a good profile of rigidity and hydrophilicity by introducing not only polycyclic structure units, but also recurring units having a high polarity. A chemically amplified positive resist composition comprising the polymer has a high sensitivity, resolution and etch resistance and improved substrate adhesion and developer affinity.
Claims19
A polymer consisting of recurring units having the general formulae (1), (2), (4) and (5), the recurring units being of at least one type for each formula, and having a weight average molecular weight of 1,000 to 50,000,
- wherein R1, R10 and R13 are independently hydrogen or methyl, R2 is an acid labile group selected from the general formulae (R2-1) to (R2-7):
- wherein the broken line indicates a bonding site and direction, R5 is each independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, R6 and R7 are each independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, or R6 and R7, taken together, may form a ring with the carbon atom to which they are attached, Z is a divalent hydrocarbon group of 2 to 20 carbon atoms which forms a single ring or bridged ring with the carbon atom to which it is attached and which may contain an oxygen atom, and m is 0 or 1,
- R11 and R12 are independently hydrogen or hydroxyl, and R14 is a lactone structure-containing group selected from the general formulae (R14-1) to (R14-5):
- wherein the broken line indicates a bonding site, R15 is a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, R16 and R17 are each independently hydrogen or a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, or R16 and R17, taken together, may form a ring with the carbon atom to which they are attached, and
- the recurring unit having the general formula (2) is selected from the group consisting of the units represented by the following formulae:
A polymer comprising recurring units having the general formulae (1) and (2), the recurring units being of at least one type for each formula, and having a weight average molecular weight of 1,000 to 50,000,
- wherein R1 is hydrogen or methyl, R2 is an acid labile group selected from the general formulae (R2-1) to (R2-7):
- wherein the broken line indicates a bonding site and direction, R5 is each independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, R6 and R7 are each independently a straight, branched or cyclic alkyl group of 1 to 10 carbon atoms, or R6 and R7, taken together, may form a ring with the carbon atom to which they are attached, Z is a divalent hydrocarbon group of 2 to 20 carbon atoms which forms a single ring or bridged ring with the carbon atom to which it is attached and which may contain an oxygen atom, and m is 0 or 1, and
- the recurring unit having the general formula (2) is selected from the group consisting of the units represented by the following formulae:
Dependencies are inferred from the claim text.