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US 7,597,814 B2Granted
Structure formed with template having nanoscale features
AssigneeHewlett-Packard Development Company, L.P.
InventorsJames W. Stasiak, Kevin Francis Peters, Pavel Kornilovich
Life of this patent
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Abstract
A structure is provided that is formed with a template defining a pattern having nanoscale features. The template may be positioned on a substrate and include a resist layer having openings formed therein, where the template is configured to accommodate the controlled assembly of nanoscale objects.
Claims14
A method of fabricating ordered patterns of nanoscale objects on a substrate surface comprising:
- applying a resist layer to a substrate surface;
- stamping an imprint mold having nanoscale teeth onto the resist layer;
- releasing the imprint mold to expose a template having a template surface formed into the imprint resist layer and having nanoscale openings formed therein to receive nanoscale objects;
- and
- depositing a plurality of discrete nanoscale objects onto the template such that the nanoscale objects are received within said nanoscale openings, said nanoscale objects are selected from the group consisting of nanoparticles, nanowires, nanorods, nanotubes, proteins, and DNA.
2 more elements
A method of forming a nanoscale object on a substrate surface comprising:
- applying a resist layer to a substrate surface;
- imprinting a nanoscale opening into the resist layer with a mold;
- removing the mold to expose said nanoscale opening in said resist layer, said nanoscale opening sized to receive a nanoscale object therein;
- and
- depositing a nanoscale object onto the resist such that the nanoscale object is receive within said nanoscale opening.
2 more elements
Dependencies are inferred from the claim text.