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US 7,597,765 B2Granted
Post etch wafer surface cleaning with liquid meniscus
AssigneeLam Research Corporation
InventorsJi Zhu, Seokmin Yun, Mark Wilcoxson, John de Larios
Life of this patent
Estimating the term…
Abstract
A method for cleaning the surface of a semiconductor wafer is disclosed. A first cleaning solution is applied to the wafer surface to remove contaminants on the wafer surface. The first cleaning solution is removed with some of the contaminants on the wafer surface. Next, an oxidizer solution is applied to the wafer surface. The oxidizer solution forms an oxidized layer on remaining contaminants. The oxidizer solution is removed and then a second cleaning solution is applied to the wafer surface. The second cleaning solution is removed from the wafer surface. The cleaning solution is configured to substantially remove the oxidized layer along with the remaining contaminants.
Claims15
A method for cleaning a semiconductor wafer, comprising:
- providing a proximity head which includes a plurality of source inlets and a plurality of source outlets, the proximity head including a head surface from which the plurality of source inlets are formed;
- moving the proximity head in close proximity to a wafer surface;
- applying through the plurality of source inlets to the wafer surface an oxidizer solution, the oxidizer solution forming an oxidizer meniscus between the head surface of the proximity head and the wafer surface, the oxidizer solution further forming an oxidized layer on one or more contaminant species on the wafer surface;
- removing the oxidizer solution from the wafer surface through the plurality of source outlets, the removing of the oxidizer solution between performed during the applying of the oxidizer solution so that the oxidizer meniscus remains between the head surface and the wafer surface during the applying and removing of the oxidizer solution;
- performing a DI water rinse operation;
- applying through, through a plurality of source inlets of a second proximity head, to the wafer surface, a cleaning solution, the second proximity head having head surface;
- and
- removing the cleaning solution from the wafer surface through a plurality of source outlets of the second proximity head, the removing of the cleaning solution being performed during the applying of the cleaning solution to define a cleaning meniscus between the head surface and the wafer surface, and the cleaning solution being defined to substantially remove the oxidized layer along with the one or more contaminant species on the wafer surface with the cleaning meniscus.
5 more elements
A method for cleaning a semiconductor wafer, comprising;
- providing one or more proximity heads, each proximity head including a head surface, the head surface including a plurality of discrete inlets and outlets, the head surface configured to be placed in proximity to a surface of the semiconductor wafer;
- applying to a wafer surface a first cleaning solution through one of the proximity heads to remove one or more contaminant species on the wafer surface;
- removing the first cleaning solution from the wafer surface along with at least some of the one or more contaminant species through one of the proximity heads, the applying and removing of the first cleaning solution defining a first cleaning solution meniscus between the wafer surface and the head surface;
- applying to the wafer surface an oxidizer solution through one of the proximity heads, the oxidizer solution forming an oxidized layer on remaining contaminant species;
- removing the oxidizer solution from the wafer surface through one of the proximity heads, the applying and removing of the oxidizer solution defining an oxidizer solution meniscus between the wafer surface and the head surface;
- applying to the wafer surface a second cleaning solution through one of the proximity heads;
- and
- removing the second cleaning solution from the wafer surface through one of the proximity heads, the applying and removing of the second cleaning solution defining a second cleaning solution meniscus between the wafer surface and the head surface, the second cleaning solution being configured to substantially remove the oxidized layer along with the remaining contaminant species.
5 more elements
A method for cleaning a wafer, comprising;
- providing one or more proximity heads, each proximity head including a head surface, the head surface including a plurality of discrete inlets and outlets, the head surface configured to be placed in proximity to a wafer;
- applying a first cleaning solution to a surface of the wafer through one of the proximity heads to remove one or more contaminant species from the surface of the wafer;
- removing the first cleaning solution from the surface of the wafer along with at least some of the one or more contaminant species through one of the proximity heads, the applying and removing of the first cleaning solution defining a first cleaning solution meniscus between the surface of the wafer and the head surface;
- applying to the surface of the wafer hydrogen peroxide through one of the proximity heads, the hydrogen peroxide forming an oxidized layer on remaining contaminant species;
- removing the hydrogen peroxide from the surface of the wafer through one of the proximity heads, the applying and removing of the hydrogen peroxide defining a hydrogen peroxide meniscus between the surface of the wafer and the head surface, the hydrogen peroxide having a concentration range of about 0.01% to about 30% by weight;
- applying to the surface of the wafer a second cleaning solution through one of the proximity heads;
- and
- removing the second cleaning solution from the surface of the wafer through one of the proximity heads, the applying and removing of the second cleaning solution defining a second cleaning solution meniscus between the surface of the wafer and the head surface, the second cleaning solution being configured to substantially remove the oxidized layer along with any contaminant species.
5 more elements
Dependencies are inferred from the claim text.