Lamp fasteners for semiconductor processing reactors
AssigneeASM America, Inc.
InventorsRobert C. Haro, Ellis G. Harvey
Life of this patent
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Abstract
A heat lamp which has captured fasteners that can attach the lamp inside a radiantly heated semiconductor processing reactor. The fasteners are captured within eyelet terminals on each end of the lamp, thereby rotatably securing the fasteners to the lamp. The eyelet terminals may have threaded apertures which screw into the threaded portion of the fasteners. Alternatively, the terminals may be adapted with tabs, conductor extensions or housing assemblies which fold over the top of a fastener inserted through the terminal. In another embodiment, the terminals may be adapted with notched projections which engage a circular dovetail in a fastener inserted through the terminal.
Claims17
A chemical vapor deposition reactor comprising a lamp, a fastener for securing the lamp inside the reactor, and means for retaining the fastener on the lamp after the lamp is removed from the reactor, wherein the lamp comprises a lamp body and a filament within the lamp body, further comprising a conductive connector which provides electrical connection from the filament to the means for retaining the fastener.
A chemical vapor deposition reactor comprising a lamp, a fastener for securing the lamp inside the reactor, and means for retaining the fastener on the lamp after the lamp is removed from the reactor,
- wherein the lamp comprises a lamp body and a filament within the lamp body, further comprising a conductive connector which provides electrical connection from the filament to the means for retaining the fastener, and
- wherein the means for retaining the fastener comprises an eyelet portion having an aperture, and
- wherein the fastener is inserted through the aperture, and
- wherein the fastener is a screw comprising a head and an elongated shank portion, the elongated shank portion having an unthreaded middle portion and a threaded end portion, and
- wherein a retaining ring maintained adjacent to the proximal end of the threaded end portion rotatably secures the fastener to the eyelet, and
- wherein an annular groove is provided adjacent to the proximal end of the threaded end portion to maintain the retaining ring and the retaining ring comprises a snap ring which snaps into the annular groove.
A chemical vapor deposition reactor comprising a lamp, a fastener for securing the lamp inside the reactor, and means for retaining the fastener on the lamp after the lamp is removed from the reactor,
- wherein the lamp comprises a lamp body and a filament within the lamp body, further comprising a conductive connector which provides electrical connection from the filament to the means for retaining the fastener, and
- wherein the means for retaining the fastener comprises an eyelet portion having an aperture, and
- wherein the fastener is inserted through the aperture, and
- wherein the means for retaining the fastener further comprises a capture portion integral with the eyelet portion, and
- wherein the capture portion comprises a housing assembly positionable over the eyelet portion, and further wherein the housing assembly comprises an arm extending from the eyelet portion, the arm having a housing portion spaced from the eyelet portion, the housing portion including an aperture, the arm portion being bendable about a radius adapted to place the housing portion over the eyelet portion.
Dependencies are inferred from the claim text.