Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses

A multidimensional alignment apparatus for multidimensional aligning of two linear multilayer Laue lenses (MLLs) for two-dimensional hard X-ray focusing comprising:

• a base,
• a lower stages group controlling a first upstream MLL and providing five degrees of freedom precision positioning adjustment for said first upstream MLL, said lower stages group including a first motorized horizontal linear stage and a nested flexural bearing structure;
• said first motorized horizontal linear stage positioning said first upstream MLL in a Z direction;
• said nested flexural bearing structure including a first motorized linear stage and a second motorized linear stage cooperating with a pair of outer flexural bearing structures to provide a linear positioning in a Y direction and a tilting adjustment around an X-axis for a second U-shaped frame, and a first piezoelectric transducer (PZT)-driven linear stage and a second PZT-driven linear stage, and an interior flexural bearing structure being operated by said first PZT-driven linear stage to provide a precise angular positioning around the Z-axis and said second PZT-driven linear stage mounted on said interior flexural bearing structure aligning said first upstream MLL in X direction;
• an upper stages group positioned over said lower stages group controlling a second downstream MLL and providing three degrees of freedom adjustment capability to precisely align and ensure stability of the two linear MLLs performing hard x-ray focusing;
• said upper stage group including a carriage and a set of flexural bearings;
• said upper stage group including a pair of linear stages driving a carriage through a set of flexural bearings to perform linear positioning in the Z-axis direction with tilting adjustment around the Y-axis.