Back to results
US 7,597,183 B2Granted
Kinematic pin with shear member and substrate carrier for use therewith
AssigneeApplied Materials, Inc.
InventorsMichael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Martin R. Elliott, Jeffrey C. Hudgens
Life of this patent
Estimating the term…
Abstract
A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.
Claims20
A substrate carrier handler comprising:
- an end effector adapted to support a substrate carrier;
- one or more kinematic pins located on the end effector for supporting a substrate carrier, the one or more kinematic pins having:
- an inclined surface for aligning the substrate carrier;
- and
- a shear member extending from the inclined surface for deterring lateral movement of the substrate carrier relative to the one or more kinematic pins and adapted to mate with a feature of the substrate carrier;
- and
- a controller adapted to cause the substrate carrier handler to accelerate the end effector so as to generate a lateral inertial load between the one or more kinematic pins, and a substrate carrier supported thereon, the controller further adapted to allow the end effector to deposit the substrate carrier on a surface.
4 more elements
A substrate carrier handler comprising:
- an end effector adapted to support a substrate carrier;
- one or more kinematic pins located on the end effector for supporting a substrate carrier, the one or more kinematic pins having:
- an inclined surface for aligning the substrate carrier, the inclined surface adapted to slidably communicate with an inclined surface of a mating feature of the substrate carrier;
- and
- a shear member extending from the inclined surface adapted to deter lateral movement of the substrate carrier relative to the one or more kinematic pins and adapted to mate with a feature of the substrate carrier, the shear member including a cylindrical portion for mating with the feature;
- and
- a controller adapted to cause the substrate carrier handler to accelerate the end effector so as to generate a lateral inertial load between the one or more kinematic pins, and a substrate carrier supported thereon, the controller further adapted to allow the end effector to deposit the substrate carrier on a surface.
4 more elements
A substrate carrier handler comprising:
- an end effector adapted to support a substrate carrier;
- one or more kinematic pins located on the end effector for supporting the substrate carrier, the one or more kinematic pins comprising:
- an inclined surface for aligning the substrate carrier, the inclined surface adapted to slidably communicate with an inclined surface of a mating feature of the substrate carrier, the inclined surface comprising an upward-tapering frustoconical surface;
- and
- a shear member extending from the inclined surface for deterring lateral movement of the substrate carrier relative to the one or more kinematic pins and adapted to mate with a feature of the substrate carrier, the shear member including a cylindrical portion protruding from the frustoconical surface for mating with the feature, the cylindrical portion and upward-tapering frustoconical surface of the inclined surface being symmetrically aligned about a common vertical axis, the shear member further having a hemispherical end distal the frustoconical surface and abutting the cylindrical portion;
- a cylindrical surface extending from a lower end of the inclined surface;
- at least one flat extending from the cylindrical surface and adapted to interact with a corresponding surface of the end effector;
- a cylindrical locating extension extending from the at least one flat and adapted to allow the pin to be fastened to the end effector;
- and
- a controller adapted to cause the substrate carrier handler to accelerate the end effector so as to generate a lateral inertial load between the one or more kinematic pins, and a substrate carrier supported thereon, the controller further adapted to allow the end effector to deposit the substrate carrier on a surface.
7 more elements
Dependencies are inferred from the claim text.