Method of evaluating adhesiveness of member
AssigneeCanon Kabushiki Kaisha
InventorToshiaki Aiba
Life of this patent
Estimating the term…
Abstract
An adhesiveness evaluation method that can be used to accurately evaluate the adhesiveness of a selected specific micro-spot of a specimen 1 of a small size. A part to be measured 5 is produced by isolating it from a surrounding part 4 and fixing it to a μ-probe 6, which is a support member. Then, the pulling force is applied to the part to be measured 5 using the μ-probe 6, which is the support member and which is fixed to it, to evaluate the adhesiveness of the part to be measured 5.
Claims7
A method of evaluating adhesiveness of a first member to a second member, which is arranged on the first member, comprising at least:
- a preparation step of preparing a specimen for measurement including the first member and the second member arranged on the first member;
- an isolation step of isolating a part to be measured of the second member from a surrounding part, the part to be measured having a size between 10 nm and 900 μm;
- a fixation step of fixing a support member to the part to be measured of the second member after the isolation step;
- and
- an evaluation step of applying a pulling force to the part to be measured of the second member by way of the support member and evaluating the adhesiveness between the first member and the part to be measured of the second member by peeling off the part to be measured of the second member from the first member, wherein said isolation step is conducted by using an ion beam, an electron beam or a light beam.
A method of evaluating adhesiveness of a first member to a second member, which is arranged on the first member, comprising at least:
- a step of preparing a specimen for measurement including the first member and the second member arranged on the first member;
- a step of arranging a support member to a part to be measured of the second member, the part to be measured having a size between 10 nm and 900 μm;
- a step of depositing a substance on the part to be measured of the second member carrying the support member arranged thereto and fixing the support member to the part to be measured of the second member;
- and
- a step of applying a pulling force to the part to be measured of the second member by way of the support member and evaluating the adhesiveness between the first member and the part to be measured of the second member by peeling off the part to be measured of the second member from the first member, wherein said fixing substance is deposited by irradiating one or more than one of an ion beam, an electron beam or a light beam in a gas atmosphere for forming a deposit of a substance.
Dependencies are inferred from the claim text.